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INFICON 皮拉尼电容式膜片真空计 (PCG55x) 集 INFICON
皮拉尼技术和陶瓷电容式膜片传感器的优势于一体。
在 10 毫巴和大气压力之间的测量范围内,电容式膜片技术不受气体类型限制,能够提供高精确度的压力测量值。
PCG55x型皮拉尼电容式膜片真空计功能丰富,提供多种配置,可满足您的特定应用要求。
现有全新EtherCAT数字接口供应!
类型 | PCG550 Tungsten | PCG552 Nickel | PCG554 ceramic coated | |
---|---|---|---|---|
测量范围 | mbarTorr | 5×10-5 … 1500 | 5×10-5 … 1500 | 5×10-5 … 1500 |
精度 | ||||
5×10-4 … 1×10-3 毫巴 (N2) | % of reading | ±50 | ±50 | ±50 |
1×10-3 … 100 毫巴 (N2) | % of reading | ±15 | ±15 | ±15 |
100 … 950 毫巴 | % of reading | ±5 | ±5 | ±5 |
950 … 1050 毫巴 | % of reading | ±2.5 | ±2.5 | ±2.5 |
可重复性 | ||||
1×10-3 … 1100 毫巴 (N2) | % of reading | ±2 | ±2 | ±2 |
容许压力 | bar (absolute) | ≤5 | ≤5 | ≤5 |
压力, | bar (absolute) | ≥10 | ≥10 | ≥10 |
容许温度 | ||||
运行(环境) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
贮存 | °C | -20 … +65 | -20 … +65 | -20 … +65 |
在法兰处烘烤 | °C | ≤80 | ≤80 | ≤80 |
在长管法兰处烘烤 | °C | ≤250 | ≤250 | ≤250 |
电源电压 | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
功耗 | ||||
无现场总线 | W | ≤2.5 | ≤2.5 | ≤2.5 |
DeviceNet™ | W | ≤3 | ≤3 | ≤3 |
Profibus | W | ≤3 | ≤3 | ≤3 |
输出信号模拟 3PCx-0xx-xxx0 | V | 0 … +10.23 | 0 … +10.23 | 0 … +10.23 |
输出信号模拟 3PCx-0xx-xxx1 | V | 0 … +8.68 | 0 … +8.68 | 0 … +8.68 |
输出信号模拟 3PCx-0xx-xxx2 | V | 0 … +5.659 | 0 … +5.659 | 0 … +5.659 |
输出信号模拟 3PCx-0xx-xxx3 | V | 0 … +9.05 | 0 … +9.05 | 0 … +9.05 |
测量范围 3PCx-0xx-xxx0 | V | +0.61 … +10.23 | +0.61 … +10.23 | +0.61 … +10.23 |
测量范围 3PCx-0xx-xxx1 | V | +1.2 … +8.68 | +1.2 … +8.68 | +1.2 … +8.68 |
测量范围 3PCx-0xx-xxx2 | V | +0.375 … +5.659 | +0.375 … +5.659 | +0.375 … +5.659 |
测量范围 3PCx-0xx-xxx3 | V | +1.57 … +9.05 | +1.57 … +9.05 | +1.57 … +9.05 |
电压与压强 | ||||
3PCx-0xx-xxx0 | volts per decade | 1.286 | 1.286 | 1.286 |
3PCx-0xx-xxx1 / -xxx2 / -xxx3 | volts per decade | 1 | 1 | 1 |
负载电阻 | kΩ | >10 | >10 | >10 |
设定点继电器 | ||||
设定点数量 | 2 | 2 | 2 | |
范围 (N2) | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
继电器触点 | n.o., potential free | n.o., potential free | n.o., potential free | |
滞后 | % of threshold | 10 | 10 | 10 |
触点额定固态继电器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
触点额定机械继电器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
转换时间 | ms | ≤30 | ≤30 | ≤30 |
接口(数字) | RS232C | RS232C | RS232C | |
电气连接 | ||||
3PCx-0xx-x0xx | FCC, 8-pin | FCC, 8-pin | FCC, 8-pin | |
3PCx-0xx-x1xx | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
3PCx-0xx-x2xx | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
3PCx-0xx-x4xx | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | |
电缆长度 | m (ft.) | ≤100 (≤330) | ≤100 (≤330) | ≤100 (≤330) |
RS232C 运行 | m (ft.) | ≤30 (≤100) | ≤30 (≤100) | ≤30 (≤100) |
暴露于真空的材料 | W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass | Ni, NiFe, Al2O3, SnAg, stainless steel, glass | Al2O3, stainless steel | |
内部容积 | ||||
DN 16 ISO-KF | cm³ | 4.7 | 4.7 | 4.7 |
DN 16 ISO-KF 长管 | cm³ | 14.5 | 14.5 | 14.5 |
DN 16 CF-F | cm³ | 8 | 8 | 8 |
DN 16 CF-R 长管 | cm³ | 14 | 14 | 14 |
DN 25 ISO-KF,4 VCR | cm³ | 5.5 | 5.5 | 5.5 |
8 VCR | cm³ | 7 | 7 | 7 |
1/8'' NPT,7/16-20 UNF | cm³ | 5.2 | 5.2 | 5.2 |
表面贴装 29 毫米/1.15 英寸 | cm³ | 4.9 | 4.9 | 4.9 |
4 VCR 90° | cm³ | 7.9 | 7.9 | 7.9 |
重量 | ||||
无现场总线接口 | g | 115 … 130 | 115 … 130 | 115 … 130 |
带现场总线接口 | g | 230 … 250 | 230 … 250 | 230 … 250 |
保护等级 | IP 40 | IP 40 | IP 40 | |
标准 | ||||
CE 合规 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | |
ETL 认证 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | |
DeviceNet™ | ||||
协议 | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | |
数据率开关 | kBaud | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable |
电缆长度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
电缆长度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
电缆长度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
MAC ID | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable | |
数字功能 | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
技术规格 | DeviceNet™ "Vacuum Gauge Device Profile" | DeviceNet™ "Vacuum Gauge Device Profile" | DeviceNet™ "Vacuum Gauge Device Profile" | |
设备类型 | ''CG'' for combination gauge | ''CG'' for combination gauge | ''CG'' for combination gauge | |
I / O 从属传讯 | polling only | polling only | polling only | |
DeviceNet™ 的电源电压 3PI6- / 3PI7- / 3PI8-0xx-xxxx | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
功耗 3PI6- / 3PI7- / 3PI8-0xx-xxxx | W | ≤3 | ≤3 | ≤3 |
DeviceNet 连接器 | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | |
Profibus DP | ||||
波特率 | kBaudMbaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
地址 | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable | |
数字功能 | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
Profibus DP 连接器 | D-Sub, 9-pin, female | D-Sub, 9-pin, female | D-Sub, 9-pin, female | |
RS485C | ||||
波特率 | kBaud | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 |
地址 | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) | |
数字功能 | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
RS485 连接器 | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
EtherCAT | ||||
协议 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
通讯标准 | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | |
节点地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
物理层 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
EtherCAT 连接器 | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
电缆 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
电缆长度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
过程数据 | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
邮箱 (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information |