CBS-分批式净化系统-安捷来国际股份（香港）有限公司手机版

CBS分批式净化系统

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安捷来国际股份（香港）有限公司

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产品简介

分批式净化系统：Theoriginalsealedstructurehasenabledtheatmosphericprocess

The original sealed structure has enabled the atmospheric process.
With the ultra high HEPA filter adopted,the maximum available temperature at 500℃ has been achieved.
Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.

Available glass size		~W730×L920mm
Temperature range		80~500℃
Temperature uniformity		±5℃
Cleanliness		Class 10 (0.3μm)
Applications		A wide variety of Annealing of LTPS & TFT

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