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标准型分子泵组 Hicube Classic 优点
前级泵可选干式隔膜泵 MVP系列和旋片真空泵 DuoLine 系列
操作简易, 即插即用
多种搭配方案满足客户需求
意外断电时, 前级真空安全阀(可选.)可保护真空腔体免受返流影响
可以直接连接真空计
分子泵组 HiCube Classic 是一个立式紧凑型涡轮分子泵组, 非常适合中小型体积腔体的应用
结合涡轮分子泵 HiPace 300 H 或 HiPace 700 H 和前级泵, 可以实现 <10-10 hPa 的极限真空.
分子泵组 Hicube 80 Classic 技术参数
进气法兰 | 氮气抽速 | 极限真空 hpa | 前级泵 型号 | 前级泵抽速 | 前级真空 | 资料 |
DN 40 ISO-KF | 35 | < 1X10-7 | MVP 040 | 2.3 | - | PM S20 230 00 |
MVP 070 | 3.8 | - | PM S20 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S20 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S20 310 00 | |||
Duo 3 | 2.5 | - | PM S20 330 00 | |||
Duo 6 M | 5 | - | PM S20 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S20 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S20 390 00 | |||
Duo 6 | 5 | - | PM S20 410 00 | |||
Duo 3 M | 2.5 | - | PM S20 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S20 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S20 470 00 | |||
DN 63 ISO-K | 67 | < 1X10-7 | MVP 040 | 2.3 | - | PM S21 230 00 |
MVP 070 | 3.8 | - | PM S21 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S21 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S21 310 00 | |||
Duo 3 | 2.5 | - | PM S21 330 00 | |||
Duo 6 M | 5 | - | PM S21 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S21 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S21 390 00 | |||
Duo 6 | 5 | - | PM S21 410 00 | |||
Duo 3 M | 2.5 | - | PM S21 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S21 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S21 470 00 | |||
DN 63 CF-F | 67 | < 1 · 10-8 | MVP 040 | 2.3 | - | PM S22 230 00 |
MVP 070 | 3.8 | - | PM S22 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S22 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S22 310 00 | |||
< 5 · 10-10 | Duo 3 | 2.5 | - | PM S22 330 00 | ||
Duo 6 M | 5 | - | PM S22 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S22 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S22 390 00 | |||
Duo 6 | 5 | - | PM S22 410 00 | |||
Duo 3 M | 2.5 | - | PM S22 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S22 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S22 470 00 |
分子泵组 Hicube 300 Classic 技术参数
进气法兰 | 氮气抽速 | 极限真空 hpa | 前级泵 型号 | 前级泵抽速 | 前级真空 | 资料 |
DN 100 ISO-K | 260 | < 1X10-7 | MVP 040 | 2.3 | - | PM S23 230 00 |
MVP 070 | 3.8 | - | PM S23 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S23 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S23 310 00 | |||
Duo 3 | 2.5 | - | PM S23 330 00 | |||
Duo 6 M | 5 | - | PM S23 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S23 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S23 390 00 | |||
Duo 6 | 5 | - | PM S23 410 00 | |||
Duo 3 M | 2.5 | - | PM S23 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S23 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S23 470 00 | |||
DN 100 CF-F | 260 | < 1X 10-8 | MVP 040 | 2.3 | - | PM S24 230 00 |
MVP 070 | 3.8 | - | PM S24 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S24 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S24 310 00 | |||
< 5X10-10 | Duo 3 | 2.5 | - | PM S24 330 00 | ||
Duo 6 M | 5 | - | PM S24 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S24 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S24 390 00 | |||
Duo 6 | 5 | - | PM S24 410 00 | |||
Duo 3 M | 2.5 | - | PM S24 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S24 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S24 470 00 |
分子泵组 Hicube 300 H Classic 技术参数
进气法兰 | 氮气抽速 | 极限真空 hpa | 前级泵 型号 | 前级泵抽速 | 前级真空 | 资料 |
DN 100 ISO-K | 260 | < 1X10-7 | MVP 040 | 2.3 | - | PM S32 230 00 |
MVP 070 | 3.8 | - | PM S32 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S32 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S32 310 00 | |||
Duo 3 | 2.5 | - | PM S32 330 00 | |||
Duo 6 M | 5 | - | PM S32 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S32 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S32 390 00 | |||
Duo 6 | 5 | - | PM S32 410 00 | |||
Duo 3 M | 2.5 | - | PM S32 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S32 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S32 470 00 | |||
DN 100 CF-F | 260 | < 1X 10-10 | MVP 040 | 2.3 | - | PM S33 230 00 |
MVP 070 | 3.8 | - | PM S33 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S33 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S33 310 00 | |||
Duo 3 | 2.5 | - | PM S33 330 00 | |||
Duo 6 M | 5 | - | PM S33 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S33 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S33 390 00 | |||
Duo 6 | 5 | - | PM S33 410 00 | |||
Duo 3 M | 2.5 | - | PM S33 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S33 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S33 470 00 |
分子泵组 Hicube 400 Classic 技术参数
进气法兰 | 氮气抽速 | 极限真空 hpa | 前级泵 型号 | 前级泵抽速 | 前级真空 | 资料 |
DN 100 ISO-K | 260 | < 1X10-7 | MVP 040 | 2.3 | - | PM S25 230 00 |
MVP 070 | 3.8 | - | PM S25 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S25 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S25 310 00 | |||
Duo 3 | 2.5 | - | PM S25 330 00 | |||
Duo 6 M | 5 | - | PM S25 350 00 | |||
Duo 3 | 2.5 | AVC 016 | PM S25 370 00 | |||
Duo 6 M | 5 | AVC 016 | PM S25 390 00 | |||
Duo 6 | 5 | - | PM S25 410 00 | |||
Duo 3 M | 2.5 | - | PM S25 430 00 | |||
Duo 6 | 5 | AVC 016 | PM S25 450 00 | |||
Duo 3 M | 2.5 | AVC 016 | PM S25 470 00 | |||
DN 100 CF-F | 260 | < 1X 10-8 | MVP 040 | 2.3 | - | PM S26 230 00 |
MVP 070 | 3.8 | - | PM S26 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S26 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S26 310 00 | |||
< 5X10-10 | Duo 3 | 2.5 | - | PM S26 330 00 | ||
Duo 6 M | 5 | - | PM S26 350 00 | |||
Duo 3 | 2.5 | AVC 016 | PM S26 370 00 | |||
Duo 6 M | 5 | AVC 016 | PM S26 390 00 | |||
Duo 6 | 5 | - | PM S26 410 00 | |||
Duo 3 M | 2.5 | - | PM S26 430 00 | |||
Duo 6 | 5 | AVC 016 | PM S26 450 00 | |||
Duo 3 M | 2.5 | AVC 016 | PM S26 470 00 |
分子泵组 Hicube 700 Classic 技术参数
进气法兰 | 氮气抽速 | 极限真空 hpa | 前级泵 型号 | 前级泵抽速 | 前级真空 | 资料 |
DN 160 ISO-K | 685 | < 1X10-7 | MVP 040 | 2.3 | - | PM S27 230 00 |
MVP 070 | 3.8 | - | PM S27 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S27 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S27 310 00 | |||
Duo 3 | 2.5 | - | PM S27 330 00 | |||
Duo 6 M | 5 | - | PM S27 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S27 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S27 390 00 | |||
Duo 6 | 5 | - | PM S27 410 00 | |||
Duo 3 M | 2.5 | - | PM S27 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S27 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S27 470 00 | |||
DN 160 CF-F | 685 | < 1X 10-8 | MVP 040 | 2.3 | - | PM S28 230 00 |
MVP 070 | 3.8 | - | PM S28 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S28 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S28 310 00 | |||
< 5X10-10 | Duo 3 | 2.5 | - | PM S28 330 00 | ||
Duo 6 M | 5 | - | PM S28 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S28 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S28 390 00 | |||
Duo 6 | 5 | - | PM S28 410 00 | |||
Duo 3 M | 2.5 | - | PM S28 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S28 460 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S28 470 00 |
分子泵组 Hicube 700 H Classic 技术参数
进气法兰 | 氮气抽速 | 极限真空 hpa | 前级泵 型号 | 前级泵抽速 | 前级真空 | 资料 |
DN 160 ISO-K | 685 | < 1X10-7 | MVP 040 | 2.3 | - | PM S36 230 00 |
MVP 070 | 3.8 | - | PM S36 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S36 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S36 310 00 | |||
Duo 3 | 2.5 | - | PM S36 330 00 | |||
Duo 6 M | 5 | - | PM S36 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S36 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S36 390 00 | |||
Duo 6 | 5 | - | PM S36 410 00 | |||
Duo 3 M | 2.5 | - | PM S36 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S36 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S36 470 00 | |||
DN 160 CF-F | 685 | < 1X 10-10 | MVP 040 | 2.3 | - | PM S37 230 00 |
MVP 070 | 3.8 | - | PM S37 250 00 | |||
MVP 040 | 2.3 | TVV 001 | PM S37 290 00 | |||
MVP 070 | 3.8 | TVV 001 | PM S37 310 00 | |||
Duo 3 | 2.5 | - | PM S37 330 00 | |||
Duo 6 M | 5 | - | PM S37 350 00 | |||
Duo 3 | 2.5 | A VC 016 | PM S37 370 00 | |||
Duo 6 M | 5 | A VC 016 | PM S37 390 00 | |||
Duo 6 | 5 | - | PM S37 410 00 | |||
Duo 3 M | 2.5 | - | PM S37 430 00 | |||
Duo 6 | 5 | A VC 016 | PM S37 450 00 | |||
Duo 3 M | 2.5 | A VC 016 | PM S37 470 00 |
标准型分子泵组 Hicube Classic 尺寸图